新的宇宙半导体材料气体检测器 气探测器 XPS72

Gas sampling method: Automatic suction type Disilane: FS/25p Target gas: Measurement range: Depth (mm): 128 Height (mm): 150 Width (mm): 62 Ammonia: FS/100ppm Silane: FS/25ppm Dichlorosilane: FS/25ppm Arsine: FS/250ppb Phosphine: FS/1.0ppm Diborane: FS/500ppb Hydrogen selenide: FS/250ppb Germanic: FS/1.0ppb ppm Chlorine: FS/5ppm Chlorine trifluoride: FS/1.0ppm Hydrogen chloride: FS/25ppm Hydrogen fluoride: FS/10ppm Hydrogen bromide: FS/10ppm Nitric oxide: FS/100ppm Hydrogen sulfide: FS/50ppm一氧化碳：FS/250ppm

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1.3kg

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肩带
4 AA碱性电池
2滤波器

• 可修复

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